Electrochemical treatment of chemical mechanical polishing wastewater: removal of fluoride — sludge characteristics — operating cost

Abstract

The aim of this paper is to propose an efficient and low-cost treatment of chemical mechanical polishing wastewater process based on electrocoagulation with iron bipolar electrodes. The performance of a pilot scale electrochemical reactor equipped with iron bipolar electrodes and an anode active area surface of about 170 cm2 was studied. In addition, sludge settling after electrocoagulation were characterized. The pilot study yield promising results, suggesting that further in-depth development study is worth to be considered in a future work.