Contribution de la microscopie électronique dans l’étude des matériaux.

Abstract

Each analytical instrument brings us new images that we must learn to read, reveals unknown phenomena that we must understand and provokes a new knowledge of the world. The objective of this study is to give an overview of two analytical techniques that can be brought used in the field of microelectronics. Optical microscopy is the oldest technique used for visualization of materials except that it is limited, today there are several variants: the scanning electron microscope (SEM) and transmission electron microscope (TEM). The SEM gives a 3D image of the outer surface, constructed by part of the electrons reflected by this surface. It thus provides information on the topography of the sample. In the case of TEM, the object to be observed is crossed by radiation. We no longer use light but a beam of electrons which will be more or less transmitted by the sample, as is the case with light in the optical microscope.